Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1984-04-18
1986-05-06
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
2504401, G21K 510
Patent
active
045874310
ABSTRACT:
A tilt stage that tilts about Y axis perpendicular to the optical axis of an electron beam which is called "the Z axis" herein is mounted to the front cover of a specimen chamber. A Z-axis stage capable of moving in the direction of Z axis and an X-axis stage capable of moving in the direction of X axis perpendicular to Y and Z axes are mounted on the tilt stage. A specimen holder for holding a specimen can be located at any desired position relative to the electron beam by the movements of these stages. Two driving shafts are disposed concentrically about the Y axis, i.e., their common axis. Driving mechanisms for independently driving the driving shafts along the Y axis are mounted to the front cover of the specimen chamber. The movements of the driving shafts are transmitted to the Z-axis stage and the X-axis stage via two levers whose pivots are supported on the tilt stage.
REFERENCES:
patent: 3629577 (1971-12-01), Weber et al.
patent: 4058731 (1977-11-01), Muller et al.
Anderson Bruce C.
Jeol Ltd.
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