Specimen-holding device for electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports

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250311, H01J 3720

Patent

active

054060877

ABSTRACT:
There is disclosed a simple specimen-holding device for use with an electron microscope. The device comprises a pair of films which transmit the electron beam. The films are reinforced with a network of reinforcing members and placed on a specimen stage. A specimen to be investigated is held in a thin space formed between the films, together with moisture. The fringes of the films are compressed together to hermetically isolate the space between the films from the specimen chamber of the microscope which is evacuated. The electron beam passes through the thin space sandwiched between the films. This permits the specimen to be observed in an almost unmodified state with little damage to the specimen.

REFERENCES:
patent: 4071766 (1978-01-01), Kalman et al.
patent: 5225683 (1993-07-01), Suzuki et al.

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