Specimen holder for holding specimen stubs to be coated in an io

Details Specimen holder for holding specimen stubs to be coated in an io Specimen holder for holding specimen stubs to be coated in an io

1987-02-17

1988-05-17

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

118500, G01F 2100

Patent

active

047452978

ABSTRACT:
A specimen holder for use in an ion beam sputter coating machine to prepare a specimen placed on a specimen stub for analysis by a scanning electron microscope. The specimen holder is comprised of two planar members, each containing a plurality of openings sufficient in size to hold a specimen stub, with screws projecting through the lip of the upper planar member to allow the specimen holder to securely hold the specimen stubs within the openings in the planar member. The lower planar member has a limited rotation, in relation to the upper planar member, to prevent the specimen stubs from falling through the openings in the specimen holder.

REFERENCES:
patent: 3195502 (1965-07-01), Levy
patent: 3245545 (1966-04-01), Lortie
patent: 3452880 (1969-07-01), Kovacik et al.
patent: 3461842 (1969-08-01), Conrad et al.
patent: 4485759 (1984-12-01), Brandolf
"A Container for Handling Small Specimens During Preparation and Examination in the Scanning Electron Microscope (SEM)", Taylor, Journal of Microscopy, vol. 105, Dec. 1975, pp. 335-338.

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