Specimen holder and apparatus for two-sided ion milling system

Details Specimen holder and apparatus for two-sided ion milling system Specimen holder and apparatus for two-sided ion milling system

1994-11-14

1995-12-05

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566261, 156345, 216 66, H01L 2100, H01L 21306, B44C 122, C03C 1500

Patent

active

054725666

ABSTRACT:
An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0.degree., from both sides of the specimen is provided and includes a specimen holder for two-sided ion beam milling and a pedestal having at least one extending specimen support arm adapted to engage a peripheral edge of a specimen. The specimen is secured to the at least one specimen support arm, preferably, so as to permit ion beams to be directed at the first and second major surfaces of the specimen simultaneously at very low angles of incidence down to 0.degree.. Both rapid milling as well as a reduction in artifacts provide high quality specimens for transmission electron microscopy analysis.

REFERENCES:
patent: 4128765 (1978-12-01), Franks
patent: 4411733 (1983-10-01), Macklin et al.
patent: 5009743 (1991-04-01), Swann
patent: 5223109 (1993-06-01), Itoh
E. A. Fischione Instruments, Inc. brochure--Model 3000 Ion Mill.
Alani et al, "Chemically Assisted Ion Beam Etching--A New Technique for TEM Specimen Preparation of Materials," reprinted from Materials Res. Soc. Symposium Proc., vol. 199.
Bal-Tec AG brochure--Rapid Ion Beam Milling System.
Technoorg Linda data sheet--Ion Beam Thinning Unit for TEM/Ion Beam Slop Cutting for SEM.

Affiliated with

Also associated with

Rating

Specimen holder and apparatus for two-sided ion milling system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Specimen holder and apparatus for two-sided ion milling system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Specimen holder and apparatus for two-sided ion milling system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1371552