Specimen holder and apparatus for two-sided ion milling system

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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1566261, 156345, 216 66, H01L 2100, H01L 21306, B44C 122, C03C 1500

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active

054725666

ABSTRACT:
An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0.degree., from both sides of the specimen is provided and includes a specimen holder for two-sided ion beam milling and a pedestal having at least one extending specimen support arm adapted to engage a peripheral edge of a specimen. The specimen is secured to the at least one specimen support arm, preferably, so as to permit ion beams to be directed at the first and second major surfaces of the specimen simultaneously at very low angles of incidence down to 0.degree.. Both rapid milling as well as a reduction in artifacts provide high quality specimens for transmission electron microscopy analysis.

REFERENCES:
patent: 4128765 (1978-12-01), Franks
patent: 4411733 (1983-10-01), Macklin et al.
patent: 5009743 (1991-04-01), Swann
patent: 5223109 (1993-06-01), Itoh
E. A. Fischione Instruments, Inc. brochure--Model 3000 Ion Mill.
Alani et al, "Chemically Assisted Ion Beam Etching--A New Technique for TEM Specimen Preparation of Materials," reprinted from Materials Res. Soc. Symposium Proc., vol. 199.
Bal-Tec AG brochure--Rapid Ion Beam Milling System.
Technoorg Linda data sheet--Ion Beam Thinning Unit for TEM/Ion Beam Slop Cutting for SEM.

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