Specimen cooling holder for side entry transmission electron mic

Details Specimen cooling holder for side entry transmission electron mic Specimen cooling holder for side entry transmission electron mic

1989-11-06

1990-08-21

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

62 511, H01V 3720

Patent

active

049509012

ABSTRACT:
An improved specimen cooling holder for transmission electron microscopy is described. Low thermal conductivity pins near the specimen and an improved conductor/dewar connection reduce specimen vibration, providing improved image resolution. Multiple heaters facilitate accurate temperature control and bakeout procedures.

REFERENCES:
patent: 4262194 (1981-04-01), Hayward
patent: 4833330 (1989-05-01), Swann et al.
patent: 4869068 (1989-09-01), Van Vloten
patent: 4870830 (1989-10-01), Hohenwarter et al.

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