Specimen cartridge for a particle beam device

Details Specimen cartridge for a particle beam device Specimen cartridge for a particle beam device

1975-09-09

1977-05-17

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

G21K 506

Patent

active

040244024

ABSTRACT:
A specimen cartridge is provided for a particle beam device, such as an electron microscope or the like equipped with a specimen table adjustable transverse to the beam axis, the cartridge being insertable into the table along an axis parallel to the beam axis. The cartridge has a conical member having a longitudinal axis and a specimen holder having a plurality of openings for receiving a corresponding number of specimens is secured to the conical member. The holder is rotatable about an axis of rotation eccentric to the longitudinal axis of the conical member.

REFERENCES:
patent: 3086112 (1963-04-01), Riecke
patent: 3240934 (1966-03-01), Watanbe et al.
patent: 3342992 (1967-09-01), Schmidt et al.
patent: 3426193 (1969-02-01), Guernet
patent: 3435210 (1969-03-01), Valdre
patent: 3586855 (1971-06-01), Fuchs
patent: 3628013 (1971-12-01), Heide

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