Specimen adjustment method and system for a corpuscular beam app

Details Specimen adjustment method and system for a corpuscular beam app Specimen adjustment method and system for a corpuscular beam app

1979-06-05

1981-09-29

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250440, G21K 510

Patent

active

042925231

ABSTRACT:
In a method and system for adjustment of a specimen supported by a specimen upport able to be changed over from one clutch state to another, the specimen is on a specimen table of an electronmicroscope or other corpuscular beam apparatus, and adjustment of the specimen table normal to a longitudinal axis of the apparatus is possible in two coordinate directions. The specimen support is first coupled to the specimen table which is then adjusted such that the specimen is put into a desired position in relation to the apparatus axis. The specimen support then is coupled up with a holding member, which, as long as the specimen support is joined to it, is generally fixed in position. The specimen table is then readjusted into a certain desired position and the specimen support is then again coupled with the specimen table.

REFERENCES:
patent: 3684904 (1972-08-01), Galutva et al.
patent: 3745341 (1973-07-01), Sakitani
patent: 3952203 (1976-04-01), Hoppe

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