Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-07-05
2005-07-05
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S292000, C359S295000, C359S298000
Reexamination Certificate
active
06914711
ABSTRACT:
Described are Micro-Electro-Mechanical Systems (MEMS) actuators with hidden combs and hinges. The ability to hide the combs renders the actuators useful in digital micro-mirror devices. Comb actuators provide increased torque, which facilitates the use of stiffer, less fragile hinge structures. Also important, comb actuators do not require mechanical stops to define stable states, and thus avoid problems associated with physical contact. The actuators are infinitely variable through a range of angles.
REFERENCES:
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 3896338 (1975-07-01), Nathanson et al.
patent: 4229081 (1980-10-01), Jones et al.
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4492435 (1985-01-01), Banton et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4662746 (1987-05-01), Hornbeck
patent: 5535047 (1996-07-01), Hornbeck
patent: 5610757 (1997-03-01), Ji et al.
patent: 5739941 (1998-04-01), Knipe et al.
patent: 5808780 (1998-09-01), McDonald
patent: 5943157 (1999-08-01), Florence et al.
patent: 6060336 (2000-05-01), Wan
patent: 6384952 (2002-05-01), Clark et al.
patent: 6541831 (2003-04-01), Lee et al.
patent: 6593677 (2003-07-01), Behin et al.
patent: 6612029 (2003-09-01), Behin et al.
patent: 6758983 (2004-07-01), Conant et al.
patent: 2002/0005976 (2002-01-01), Behin et al.
patent: 2002/0127760 (2002-09-01), Yeh et al.
patent: 2003/0218793 (2003-11-01), Soneda et al.
patent: 2004/0032634 (2004-02-01), Hah et al.
“Why is the Texas Instruments Digital Micromirror Device™ (DMD™) so Reliable?” Downloaded at http://www.ti.com/dlp. 7 pages, no date.
“Supercritical Carbon Dioxide Solvent Extraction from Surface-Micromachined Micromechanical Structures.” SPIE Micromachining and Microfabrication, Oct. 1996. 12 pages.
Novotny Vlad J.
Shah Paren
Active Optical Networks, Inc.
Behiel Arthur J.
Lester Evelyn A.
Silicon Edge Law Group LLP
LandOfFree
Spatial light modulator with hidden comb actuator does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Spatial light modulator with hidden comb actuator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spatial light modulator with hidden comb actuator will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3379171