4. Optical: systems and elements
  5. Optical modulator
  6. Light wave temporal modulation

Paren Shah

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Methods for fabricating spatial light modulators with hidden...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Spatial light modulator with hidden comb actuator

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2808764

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