Spatial light modulator having a cantilever anti-stiction...

Details Spatial light modulator having a cantilever anti-stiction... Spatial light modulator having a cantilever anti-stiction...

2008-07-29

2008-07-29

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S295000, C359S226200

Reexamination Certificate

active

07405862

ABSTRACT:
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a louver surface having a recess in the lower surface, a first cavity having an opening on the lower surface, and a cantilever situated under the recess and connected with the lower portion of the mirror plate. The mirror plate can tilt around a hinge component extending into the first cavity. The hinge component is supported by a stationary substrate. The tilt movement of the mirror plate can be stopped when the cantilever comes to contact with a stationary object.

REFERENCES:
patent: 6992810 (2006-01-01), Pan et al.
patent: 2005/0128564 (2005-06-01), Pan
patent: 2007/0121191 (2007-05-01), Pan
patent: 2007/0121192 (2007-05-01), Lee et al.
patent: 2007/0127110 (2007-06-01), Pan
patent: 2007/0132681 (2007-06-01), Chen

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