Spatial light modulator and method

Details Spatial light modulator and method Spatial light modulator and method

1984-07-31

1986-01-28

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29569L, 156643, 156644, 156646, 156653, 156656, 156657, 1566591, 350356, 350360, B44C 122, C03C 1500, C03C 2506, C23F 102

Patent

active

045669350

ABSTRACT:
Methods of fabrication of spatial light modulators with deflectable beams by plasma etching after dicing of a substrate into chips, each of the chips an SLM, is disclosed. Also, various architectures available with such plasma etching process are disclosed and include metal cloverleafs for substrate addressing, metal flaps formed in a reflecting layer over a photoresist spacer layer, and torsion hinged flaps in a reflecting layer.

REFERENCES:
patent: 3893231 (1975-07-01), Anderson
patent: 3920495 (1975-11-01), Roberts
patent: 4457820 (1984-07-01), Bergeron et al.
patent: 4472239 (1984-09-01), Johnson et al.
IBM Technical Disclosure Bulletin, vol. 24, No. 12, May 1982, Optical Inspection of Hole Bottoms, D. S. Goodman et al., p. 6280.

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