Spacers used to form isolation trenches with improved corners

Details Spacers used to form isolation trenches with improved corners Spacers used to form isolation trenches with improved corners

1994-12-13

1998-03-31

Fourson, George

Metal treatment

Barrier layer stock material, p-n type

With non-semiconductive coating thereon

437 67, H01L 4900

Patent

active

057333831

ABSTRACT:
A trench for isolating active devices on a semiconductor substrate, formed by creating a trench which has a peripheral edge, and disposing an isolating material in the trench. The isolating material extends over the peripheral edge of the trench, thereby covering at least a portion of the substrate surrounding the trench, and substantially limiting leakage of the active devices disposed on the substrate.

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