Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package
Reexamination Certificate
2007-03-13
2007-03-13
Pizarro, Marcos D. (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Housing or package
C156S247000, C257SE23003, C428S040100, C438S464000
Reexamination Certificate
active
11087375
ABSTRACT:
A semiconductor spacer structure comprises in order a backgrinding tape layer, a spacer adhesive layer, a semiconductor spacer layer, an optional second spacer adhesive layer, a dicing tape layer. In a first method a spacer wafer having first and second sides, a backgrinding tape layer and a spacer adhesive layer between the first side and the backgrinding tape layer, is obtained. The second side is background and secured to a dicing tape. The backgrinding tape is removed and the resulting structure is diced to create spacer/adhesive die structures. A second method backgrinds the second side with the backgrinding tape layer at the first side. A protective cover layer is secured to the second side with a spacer adhesive layer therebetween. The backgrinding tape layer is removed and the remaining structure is secured to a dicing tape with the protective cover layer exposed. The protective cover layer is removed and the resulting structure is diced thereby creating spacer/adhesive die structures. The thickness of the second spacer adhesive layer may be selected to accommodate an uneven support surface.
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Lintec Semiconductor-Related Products Web Site, “Adwill Semiconductor-Related Products”, 1 page, http://www.lintec.co.ip/e-dept/english/adwill/adwill.html, downloaded Mar. 1, 2004.
Lintec Semiconductor-Related Products Web Site, “Products for Dicing Process”, 2 pages, http://www.lintec.co.ip/e-dept/english/adwill/diceproces.html, downloaded Mar. 1, 2004.
Lintec Semiconductor-Related Products Web Site, “Products for back-grinding process”, 1 page, http://www.lintec.co.ip/e-dept/english/adwill/bgproces.html, Downloaded Mar. 1, 2004.
ChipPac, Inc.
Haynes Beffel & Wolfeld LLP
Kennedy Bill
Pizarro Marcos D.
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