Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1996-04-19
1997-08-05
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250423F, H01J 3726, H01J 37073
Patent
active
056545487
ABSTRACT:
A source for intense coherent electron pulses of an energy below 1 keV comprises an ultrasharp electron-emitting tip and an anode both arranged in mutual alignment inside a vacuum envelope A pulsed potential with an amplitude in the range between 100 V and 500 V and with a variable pulse rate is applied between said tip and said anode. The tip is maintained negative with respect to said anode, the tip having a sharpness such that the electric field at its surface exceeds 10.sup.7 V/cm at said pulsed potential.
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Fink Hans-Werner
Schmid Heinz
Berman Jack I.
International Business Machines - Corporation
Morris Daniel P.
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