SOS island edge passivation structure

Metal treatment – Barrier layer stock material – p-n type – With non-semiconductive coating thereon

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29571, 29578, 148175, 357 4, 357 23, 357 54, 357 56, 01L 2978, H01L 2712

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043680852

ABSTRACT:
A silicon-on-sapphire semiconductor structure, and method of fabricating such structure, in which a silicone nitride layer is provided over the oxide layer. The silicon nitride layer is disposed over the upper edge of the silicon island, and acts to prevent gate oxide breakdown.

REFERENCES:
patent: 3740280 (1973-06-01), Ram Shaul Ronen
patent: 4057824 (1977-11-01), Woods
patent: 4097314 (1978-06-01), Schlesier et al.
patent: 4174217 (1979-11-01), Flatley
patent: 4199384 (1980-04-01), Hsu
patent: 4263709 (1981-04-01), Weitzel et al.
Proceedings of the 8th Conference ('76 International) On Solid State Devices in Japanese Journal of Applied Physics, vol. 16, 1977, Supplement 16-1, Tokyo, Y Sakai et al: "A New Isolation Technique for SOS/LSI's-Local Buried Oxide Isolation of SOS (LOBOS)," pp. 551-555.

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