Sorting/storage device for wafers and method for handling...

Details Sorting/storage device for wafers and method for handling... Sorting/storage device for wafers and method for handling...

2006-07-18

2006-07-18

Lillis, Eileen D. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S805000

Reexamination Certificate

active

07077614

ABSTRACT:
Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the sorting device. In the immediate vicinity of the sorting device, the cassettes are stored in a magazine which is designed for this purpose and the cassettes are moved using a handling device for cassettes.

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