Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Patent
1998-12-14
2000-03-28
Kopec, Mark
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
510176, 510178, 134 2, 134 3, 134 38, 134 41, 134 42, C11D 306, C11D 302, C23G 102, B08B 308
Patent
active
060432063
ABSTRACT:
Cleaning solutions for removing contaminants from integrated circuit substrates comprise fluoroboric acid and phosphoric acid. Methods of removing contaminants from integrated circuit substrates comprise contacting the substrates with cleaning solutions comprising fluoroboric acid and phosphoric acid. The integrated circuit substrates are then contacted with aqueous solutions.
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Koh Young-bum
Lee Moon-Hee
Park Heung-soo
Song Jae-Inh
Kopec Mark
Mruk Brian P.
Samsung Electronics Co,. Ltd.
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