Solid surface observation method and apparatus therefor, and ele

Details Solid surface observation method and apparatus therefor, and ele Solid surface observation method and apparatus therefor, and ele

1994-01-21

1996-04-23

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3700

Patent

active

055106145

ABSTRACT:
A surface of an insulator or semiconductor substrate is irradiated with a beam such as an electron beam, an electromagnetic wave beam, an ion beam, etc. to excite carriers so as to form an electrical conductive layer on the surface of and in the inside of the substrate to thereby make it possible to perform observation and micro working on the insulator by using a scanning tunneling microscope.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4724318 (1988-02-01), Binnig
patent: 4829507 (1989-03-01), Kazan et al.
patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 4878213 (1989-10-01), Kazan et al.
patent: 4907195 (1990-03-01), Kazan et al.
patent: 4941753 (1990-07-01), Wickramasinghe
patent: 4942299 (1990-07-01), Kazmerski
patent: 4987312 (1991-01-01), Eigler
patent: 5166919 (1992-11-01), Eigler
patent: 5262642 (1993-11-01), Wessels et al.
Nature, vol.344.5, Apr. 1990, "Positioning Single Atoms With A Scanning Tunnelling Microscope", Eigler et al. pp. 524-526.

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