Solid-state imaging devices having combined microlens and light

Details Solid-state imaging devices having combined microlens and light Solid-state imaging devices having combined microlens and light

1998-05-21

2000-12-05

Lee, John R.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

250216, H01L 2714

Patent

active

061570176

ABSTRACT:
Solid-state imaging devices having combined microlens and light dispersion layers include a semiconductor substrate, a light transmission layer and an improved lens layer. The semiconductor substrate and light transmission layer collectively form an imaging substrate having a face thereon and a plurality of light sensing elements therein extending adjacent the face. The light transmission layer may include a first polarizing layer, an array of color filters and a second polarizing layer. The lens layer comprises an array of microlenses and a light dispersion layer. The preferred lens layer is formed on an upper face of the imaging substrate. The array of microlenses in the lens layer may be formed by reflowing a two-dimensional array of spaced photoresist regions (e.g., resist cylinders) as circular-shaped lenses having convex outer surfaces. A light dispersion layer is also preferably formed on the face of the imaging substrate. The light dispersion layer may be formed as a conformally deposited mesh-shaped layer having openings therein which are defined by the array of microlenses and having concave-shaped depressions therein which extend between adjacent microlenses. The light dispersion layer is preferably formed of a material having an index of refraction in a range between about 1.45 and 1.50 and the microlenses are preferably formed of a material having an index of refraction in a range between about 1.65 and 1.70.

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Microlensarrays, 5 pages, web page, University of Neuchatel, Switzerland, at http://www-optics.unine.ch.

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