Solid-state imaging device and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S290000

Reexamination Certificate

active

07851838

ABSTRACT:
A solid-state imaging device with a semiconductor substrate; a pixel formation region in the substrate and including a pixel made of a photoelectric conversion element; and an element isolation portion in the substrate and including an element isolation insulating layer and an impurity element isolation region. The element isolation insulating layer is positioned in a surface of the substrate. The impurity element isolation region is positioned under the element isolation insulating layer and within the substrate. The impurity element isolation region has at least a portion with a width that is narrower than that of the element isolation insulating layer. The photoelectric conversion element extends to a position under the element isolation insulating layer of the element isolation portion.

REFERENCES:
patent: 6403998 (2002-06-01), Inoue
patent: 6661045 (2003-12-01), Ishiwata
patent: 6744084 (2004-06-01), Fossum
patent: 7101726 (2006-09-01), Yamamoto et al.
patent: 7122840 (2006-10-01), Hsu et al.
patent: 2006/0011952 (2006-01-01), Ohkawa
patent: 58-015280 (1983-01-01), None
patent: 59-130468 (1984-07-01), None
patent: 11-274450 (1999-10-01), None
patent: 2004-039832 (2004-02-01), None
patent: 2004-111488 (2004-04-01), None
Japanese Patent Office Action corresponding to Japanese Serial No. 2008-123004 dated Mar. 18, 2010.

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