Solid-state imaging device and method of manufacturing the same

Details Solid-state imaging device and method of manufacturing the same Solid-state imaging device and method of manufacturing the same

1993-05-24

1994-08-09

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566591, 156668, H01L 3100

Patent

active

053363671

ABSTRACT:
A solid-state imaging device comprises a color filter formed of a colored transparent material having intended spectral transmissivity characteristics. The color filter possesses plural spectral transmissivity characteristics in one layer. In this constitution, the distance from the color filter to the light sensing part is not extended, and flicker and other image characteristic defects are eliminated- Being not of laminate structure, cracks of color filter due to thermal impact are eliminated, and the reliability is enhanced. In the manufacturing method, by dry-etching of the colored transparent material, the solid-state imaging-device having a color filter is realized. Accordingly, the color filter my be formed without exposure accompanied by pattern formation, development and dyeing process, so that an efficient manufacturing method is realized.

REFERENCES:
patent: 5238856 (1993-08-01), Tokumitsu
patent: 5239412 (1993-08-01), Naka et al.

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