Solid material gasification method, thin film formation...

Details Solid material gasification method, thin film formation... Solid material gasification method, thin film formation...

2006-05-16

2006-05-16

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Radiation or energy treatment modifying properties of...

C118S715000

Reexamination Certificate

active

07045473

ABSTRACT:
Solid material gasification method comprises a solution preparation step wherein a first solid material is dissolved in a solvent to prepare a gasification solution, a solvent removal step wherein a second solid material is separated by removing the solvent used to prepare the gasification solution from that solution, and a solid sublimation step wherein the second solid material is gasified by sublimation.

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