Coherent light generators – Particular active media – Gas
Patent
1999-05-12
2000-02-08
Scott, Jr., Leon
Coherent light generators
Particular active media
Gas
372 57, 372 34, H01S 322
Patent
active
060234865
ABSTRACT:
A tangential fan with cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential positions of blade members can shift monotonically or reversibly between ends. Blade members can be formed into air foil shapes and are stiffened by one or more transverse annular hub members. Processes for making tangential fans include soldering, casting, and machining from a solid block. Monolithic structures can be joined, typically by soldering or electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Soldering produces substantially silicon-free assemblies. Tangential fans produced in accordance with the invention have improved mechanical rigidity, accurate tolerances, and low contaminant concentrations.
REFERENCES:
patent: 4099143 (1978-07-01), Foster
patent: 4571730 (1986-02-01), Mizouguchi et al.
patent: 5748656 (1998-05-01), Watson et al.
patent: 5770933 (1998-06-01), Larson et al.
patent: 5771258 (1998-06-01), Morton et al.
patent: 5870420 (1999-02-01), Webb
Hofmann Thomas
Howey James K.
Shannon Robert A.
Ujazdowski Richard C.
Cymer Inc.
Jr. Leon Scott
Tiffany William B.
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