4. Coherent light generators
  5. Particular active media
  6. Gas

James K. Howey

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Declarative management framework

Data processing: database and file management or data structures – Data integrity – Policy – rule-based management of records – files – and documents
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DUV light source optical element improvements

Coherent light generators – Particular resonant cavity – Mirror support or alignment structure
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Extensible data collectors

Data processing: database and file management or data structures – Database and file access – Preparing data for information retrieval
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Extreme repetition rate gas discharge laser

Coherent light generators – Particular beam control device – Control of pulse characteristics
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Gas discharge laser with improved beam path

Coherent light generators – Particular active media – Gas
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Profile ID: LFUS-PAI-P-589947

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