SOI semiconductor device including a guard ring region

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S409000, C257SE27112, C257SE29063

Reexamination Certificate

active

07432551

ABSTRACT:
An object is to increase the amount of substrate noise absorbed in a guard ring, and to prevent a malfunction caused by the substrate noise in a semiconductor device including an SOI substrate provided with the guard ring. Then, there is provided a semiconductor device, including: an SOI substrate in which a support substrate10,an insulating layer11,and an SOI layer12are stacked one by one; an element section4provided in one region of the SOI substrate; and a guard ring region8provided around the element section4of the SOI substrate, wherein a first diffusion layer15provided in the SOI layer12of the element section4,and a second diffusion layer26provided in the SOI layer12of the guard ring region8are electrically connected to each other.

REFERENCES:
patent: 6355537 (2002-03-01), Seefeldt
patent: 6429502 (2002-08-01), Librizzi et al.
patent: 6459134 (2002-10-01), Ohguro et al.
patent: 7339249 (2008-03-01), Yamamoto et al.
patent: 2004/0089901 (2004-05-01), Ohkubo et al.
patent: 2004/0129977 (2004-07-01), Ohkubo et al.
patent: 2005/0189602 (2005-09-01), Yamamoto et al.
Jean-Pierre Raskin et al., “Substrate Crosstalk Reduction Using SOI Technology”, IEEE Transactions on Electron Devices, vol. 44, No. 12, Dec. 1997, pp. 2252-2261.

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