X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
Patent
1993-12-07
1995-07-18
Church, Craig E.
X-ray or gamma ray systems or devices
Specific application
Telescope or microscope
378206, G21K 700
Patent
active
054349010
ABSTRACT:
In a soft X-ray microscope including a soft X-ray source for emitting soft X-rays, a condenser lens for focusing the soft X-rays onto a specimen under inspection, an objective lens for focusing soft X-rays emanating from the specimen, a soft X-ray detector for receiving the soft X-rays focused by the objective lens, and a visually observing optical system for forming a visible image of the specimen by converting an optical property of the specimen other than contrast and color into a contrast in brightness or color. The visually observing optical system may be formed as phase contrast microscope, dark field microscope, polarizing microscope, differential interference microscope, or fluorescent microscope. Then, alignment and focus adjustment can be performed by observing the visible image of the specimen without irradiating the specimen with the soft X-rays even if the specimen has substantially no contrast and color.
REFERENCES:
patent: 5119411 (1992-06-01), Nakamura
Horikawa Yoshiaki
Iketaki Yoshinori
Mochimaru Shoichiro
Nagai Komei
Church Craig E.
Olympus Optical Co,. Ltd.
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