Soft X-ray microscope

Details Soft X-ray microscope Soft X-ray microscope

1992-05-29

1994-05-10

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Telescope or microscope

378 84, G21K 700

Patent

active

053115651

ABSTRACT:
A soft X-ray microscope comprising a soft X-ray radiation source which is substantially a spot radiation source, a condenser for leading soft X-rays from the radiation source to a sample, a reflecting mirror for grazing incidence which is disposed between the radiation source and the condenser, and has a rough reflecting surface, an objective optical system for forming a magnified image of the sample, and a soft X-ray detector for receiving the soft X-rays from the objective optical system. This microscope exhibits excellent imaging characteristic even when it uses a spot radiation source.

REFERENCES:
"X-Ray Microscopy With Synchrotron Radiation" Rudolph et al, Applied Physics vol. 15 #8, Aug. 1976, pp. 1883-1884.
Principles of Optics Title Page and Copyright Page--Max Born and Emil Wolf-1964.
X-Ray Optical Element and their Applications--Grazing Incidence Mirror 3.1-Partial Translation.
Principles of Optics, pp. 526-533.
Fourier Imaging of Phase Information In Scanning and Conventional Optical Microscopes, pp. 513-517, by C. J. R. Shepparrd & T. Wilson.
Axisymmetric Grazing Incidence Optics for an X-Ray Microscopes and Microprobe S. Aoki, pp. 102-106.
A Zone Plate Soft X-Ray Microscope Using Undulator Radiation at the Photon Factory pp. 296-301 Y. Kagoshima et al.

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