Soft template with alignment mark

Details Soft template with alignment mark Soft template with alignment mark

2007-11-27

2010-12-28

Nguyen, Khanh (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

With step of making mold or mold shaping, per se

Utilizing surface to be reproduced as an impression pattern

C425S385000, C425S193000, C425S412000, C249S114100, C264S131000, C264S293000

Reexamination Certificate

active

07858010

ABSTRACT:
A pattern template includes a flexible substrate, a template mold formed on the flexible substrate to include a pattern, and an alignment mark, the alignment mark has a greater refractive index than that of the template mold. The template is manufactured by providing a master template including a pattern area, coating resin for mold in the pattern area, forming a template mold by installing a flexible plate on the resin for mold and curing the resin for mold by radiating UV rays, separating the template mold and the master template, coating a metal thin film on the template mold, and forming an alignment mark at both sides of the template mold.

REFERENCES:
patent: 5266511 (1993-11-01), Takao
patent: 6210858 (2001-04-01), Yasuda et al.
patent: 7057832 (2006-06-01), Wu et al.
patent: 2001/0007682 (2001-07-01), Chiu et al.
patent: 2002/0133129 (2002-09-01), Arias et al.
patent: 2003/0127007 (2003-07-01), Sakurai et al.
patent: 2004/0135293 (2004-07-01), Umeki
patent: 2006/0139561 (2006-06-01), Hofmann et al.
patent: 2006/0275018 (2006-12-01), Chae

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