Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2005-02-15
2005-02-15
Eley, Timothy V. (Department: 3724)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C137S012000, C451S008000, C451S060000, C451S099000, C451S446000
Reexamination Certificate
active
06855031
ABSTRACT:
In a first aspect of the invention, a polishing device is provided. The polishing device includes a platen adapted to support a polishing pad and also includes a source of polishing slurry. Also included in the polishing device is a slurry supply line adapted to supply the polishing slurry from the source of polishing slurry to the polishing pad. The polishing device includes a pressure transducer installed along the slurry supply line and adapted to detect a pressure inside the slurry supply line. Numerous other aspects are provided.
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patent: 6183341 (2001-02-01), Melcer
Brown Brian J
Fuksshimov Boris
Garretson Charles C
Rudd Jeff P
Applied Materials Inc.
Dugan & Dugan
Eley Timothy V.
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