Fluid handling – Processes
Reexamination Certificate
2008-07-01
2008-07-01
Lee, Kevin L (Department: 3753)
Fluid handling
Processes
C137S240000, C137S563000, C137S565010
Reexamination Certificate
active
11557118
ABSTRACT:
A slurry dispensing system comprises a first supply station, a second supply station, a first loop, a second loop, a first valve and a second valve. The first loop is selectively connected to the first supply station and the second supply station. The second loop is also selectively connected to the first supply station and the second supply station. The first valve connects the first loop to points of use. The second valve connects the second loop to the points of use. When slurry is supplied to the first loop from the first slurry station, slurry is supplied to the second loop from the second slurry station. When the first valve is opened and the second valve is closed, slurry is supplied to the points of use from the first loop.
REFERENCES:
patent: 3061198 (1962-10-01), Kerr et al.
patent: 4513894 (1985-04-01), Doyle et al.
patent: 5556033 (1996-09-01), Nachtman
Chen Chiang-Jeh
Chen Cho-Ching
Chu Hui-Ming
Hsu Ming-Tzung
Tan Paul
Lee Kevin L
Taiwan Semiconductor Manufacturing Co. Ltd.
Thomas Kayden Horstemeyer & Risley
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