4. Fluid handling
  5. Processes

Cho-Ching Chen

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Apparatus and method for drying wafers by a solvent

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Slurry dispensing system

Fluid handling – Processes
Reexamination Certificate

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Slurry dispensing system

Fluid handling – Processes
Reexamination Certificate

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Wet dip method for photoresist and polymer stripping without...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2367038

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