Slurry delivery arm

Details Slurry delivery arm Slurry delivery arm

2005-09-06

2005-09-06

Morgan, Eileen P. (Department: 3723)

Abrading

Abrading process

Abradant supplying

C451S041000, C451S036000, C451S446000

Reexamination Certificate

active

06939210

ABSTRACT:
A polishing fluid delivery apparatus has been provided that in one embodiment includes a support member, a dispense arm, a polishing fluid delivery tube and a variable restricting device. The dispense arm extends from an upper portion of the support member and has an outlet of the delivery tube coupled thereto. The restricting device interfaces with the delivery tube and is adapted to provide a variable restriction to flow passing through the delivery tube. In another embodiment, the restricting device is a pinch valve and the tube in continuous from the outlet to beyond a portion that interfaces with the pinch valve. In yet another embodiment, the position of the delivery arm is controllable.

REFERENCES:
patent: 6398627 (2002-06-01), Chiou et al.
patent: 6413154 (2002-07-01), Togawa et al.
patent: 6488566 (2002-12-01), Sandhu et al.
patent: 6551174 (2003-04-01), Brown et al.
patent: 00/51168 (2000-08-01), None
U.S. Appl. No. 09/921,588, filed Aug. 2, 2001, Withers et al.
U.S. Appl. No. 10/131,638, filed Apr. 22, 2001, Vereen et al.

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