Slurry collection device and method

Details Slurry collection device and method Slurry collection device and method

2005-03-29

2005-03-29

Hassanzadeh, P. (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

Reexamination Certificate

active

06872280

ABSTRACT:
A slurry collection device1includes a ring-shaped barrier member2provided around a turntable T of a polishing machine E and a ring-shaped slurry collection container3provided around the barrier member2.The turntable T is connected to an upper end of a main rotation shaft T1that sticks out from a bottom portion of a sink S of the polishing machine E and is lifted from the bottom portion of the sink S. The slurry collection device1of the present invention is inserted between the turntable T and the sink S.

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