Slope etching process

Details Slope etching process Slope etching process

1991-10-28

1992-12-29

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 156657, 1566591, 156662, 156626, 156904, H01L 21306, B44C 122, C03C 1500, C23F 100

Patent

active

051748576

ABSTRACT:
A slope etching process comprising the steps of coating a photoresist on a layer of hard material, baking the photoresist under a predetermined condition so that it flows down to have at its opposite side edges respective slant surface of a desired slope angle and then dry etching simultaneously the photoresist and the hard material layer so as to provide the hard material layer at its opposite side edges with a desired slope angle. In accordance with this process, the step coverage is improved, and thus the rate of poor products and the generation of noise are reduced.

REFERENCES:
patent: 4409319 (1983-10-01), Colacino et al.
patent: 4671849 (1987-06-01), Chen et al.
patent: 4698128 (1987-10-01), Berglund et al.
patent: 4705597 (1987-11-01), Gimpelson et al.
patent: 4892613 (1990-01-01), Motai et al.

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