Valves and valve actuation – With means for blocking or disabling actuator – Latch manipulator mounted on valve body
Reexamination Certificate
2006-03-07
2006-03-07
Keasel, Eric (Department: 3754)
Valves and valve actuation
With means for blocking or disabling actuator
Latch manipulator mounted on valve body
C251S193000
Reexamination Certificate
active
07007919
ABSTRACT:
An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve isolates from each other. The slit valve door actuator assembly includes an actuator which moves the slit valve door between open and closed positions, and a locking mechanism to keep the slit valve door in a position to seal the slit valve in resistance to high gas pressure against the slit valve door. The locking mechanism may include a hard stop which is selectively movable into position to block retracting movement of the slit valve door.
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Beer Emanuel
Blonigan Wendell
Kim Sam H.
Munoz Jaime
Suh Dongchoon
Applied Materials Inc.
Dugan & Dugan
Keasel Eric
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