Slit valve apparatus and method

Details Slit valve apparatus and method Slit valve apparatus and method

1992-04-10

1993-07-13

Schwadron, Martin P.

Valves and valve actuation

Hermetic flexible wall seal for actuator

Bellows

137315, F16K 3144

Patent

active

052266320

ABSTRACT:
A slit valve apparatus associated with an aperture in a chamber wall through which a semiconductor wafer may be passed along a transfer plane. The apparatus is characterized by a valve seat which is angled relative to the transfer plane and a door which moves linearly along an axis substantially perpendicular to the valve seat. All frictionally engaged parts of the slit valve assembly are isolated from the interior of the chamber by a bellow sleeve to reduce the formation of particles. The method is characterized by the steps of surrounding the aperture with a first seating surface defining a sealing plane which is angularly disposed with respect to the transfer plane and engaging or disengaging a second seating surface with the first seating surface by linearly moving the second seating surface in a direction perpendicular to the sealing plane.

REFERENCES:
patent: 2924233 (1960-02-01), Michaels
patent: 4270727 (1981-06-01), Norman
patent: 4421298 (1983-12-01), Kujawski
patent: 4515344 (1985-05-01), Gemignani
patent: 4721282 (1988-01-01), Shawver et al.
patent: 4869458 (1989-09-01), Susini et al.

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