Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2008-12-04
2010-12-28
Kim, Robert (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C250S310000, C250S311000, C250S492100, C250S492200, C250S492300
Reexamination Certificate
active
07858936
ABSTRACT:
Imprecisely located defects are imaged by milling a series of slices and performing a light, preferential etch to provide a topographical interface between materials having similar secondary electron emission characteristics. The slices are sufficiently small to capture small defects, but are sufficiently large to overcome problems with redeposition.
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Bray Matthew
Castagna Marc
FEI Company
Griner David
Kim Robert
Maskell Michael
Scheinberg Michael O.
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