Fishing – trapping – and vermin destroying
Patent
1993-12-02
1995-01-03
Quach, T. N.
Fishing, trapping, and vermin destroying
437228, 156643, 156646, 156653, H01L 21302
Patent
active
053786483
ABSTRACT:
Capacitors such as storage cells for Dynamic Random Access Memories are formed in a process for etching a polycrystalline silicon layer to form a storage cell during the manufacture of a semiconductor device. The etch results in a cell having reduced undercutting of the poly cell, and eliminates the formation of poly stringers. The inventive etch comprises the use of NF.sub.3 and/or SF.sub.6 during a magnetically enhanced low pressure reactive ion etch using a carbon-free etch gas of Cl.sub.2.
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Blalock Guy T.
Lin Audrey P.
Martin Kevin D.
Micro)n Technology, Inc.
Quach T. N.
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