Single wafer regrowth of silicon

Details Single wafer regrowth of silicon Single wafer regrowth of silicon

1991-08-28

1992-07-28

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566207, 15662071, 15662072, 156DIG64, 156DIG98, 156DIG102, 422247, 422251, 422253, C30B 3000

Patent

active

051338297

ABSTRACT:
A wafer chuck is used to support a circular silicon wafer, which has formed from a single wafer casting process, in order to perform monocrystalline silicon regrowth. The cast wafer, having a monocrystalline silicon seed, located at its center, rests atop raised portions of the chuck and is held in place by vacuum at the center and the perimeter. The rest of the underside of the wafer is physically separated from the chuck surface by pressurized gas. An annular laser beam is then used to melt the silicon from the seed outward to grow the wafer into a monocrystalline form.

REFERENCES:
patent: 2852351 (1958-09-01), Pfann
patent: 2926075 (1960-02-01), Pfann
patent: 3865564 (1975-02-01), Jaeger et al.
patent: 4343829 (1982-08-01), Tochikubo et al.
patent: 4488930 (1984-12-01), Koe
patent: 4561486 (1985-12-01), Maeda et al.
patent: 4731516 (1988-03-01), Noguchi et al.
VLSI Technology S. M. Sze "Crystal Growth and Wafer Preparation," C. W. Pearce, McGraw Hill, 1988.
J. Appl. Phys. 63(8), pp. 2660-2668, "Role of impurities in zone melting recrystallization of 10 .mu.m thick polycrystalline silicon films", Mertens et al., Apr. 15, 1988.
Appl. Phys. pp. 561-563, "Improved techniques for growth of large-area single-crystal SI sheets over SiO.sub.2 using lateral epitaxy by seeded solidification", Tsaur et al., Oct. 1, 1981.
Zone Melting; William G. Pfann; John Wiley and Sons: New York; 1958 and 1966.

Affiliated with

Also associated with

Rating

Single wafer regrowth of silicon does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Single wafer regrowth of silicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Single wafer regrowth of silicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1685245