Single stage charged particle beam energy width reduction...

Details Single stage charged particle beam energy width reduction... Single stage charged particle beam energy width reduction...

2004-09-02

2008-12-23

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000, C250S3960ML

Reexamination Certificate

active

07468517

ABSTRACT:
The present invention provides a charged particle beam device. The device comprises a first lens generating a crossover a second lens positioned after the crossover and an element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

REFERENCES:
patent: 7244932 (2007-07-01), Nakasuji et al.
patent: 7335894 (2008-02-01), Frosien et al.
patent: 2007/0164228 (2007-07-01), Frosien
patent: 2007/0200069 (2007-08-01), Frosien et al.

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