Single phase proximity head having a controlled meniscus for...

Details Single phase proximity head having a controlled meniscus for... Single phase proximity head having a controlled meniscus for...

2011-08-16

2011-08-16

Perrin, Joseph L (Department: 1711)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S102300, C134S902000, C034S407000

Reexamination Certificate

active

07997288

ABSTRACT:
A system for processing a substrate is described. The system includes a proximity head, a mechanism, and a liquid supply. The proximity head is configured to generate a controlled meniscus. Specifically, the proximity head has a plurality of dispensing nozzles formed on a face of the proximity head. The dispensing nozzles are configured to supply a liquid to the meniscus and the suction holes are added to remove a used liquid from the meniscus. The mechanism moves the proximity head or the substrate with respect to each other while maintaining contact between the meniscus and a surface of the substrate. The movement causes a thin layer of the liquid to remain on the surface after being contacted by the meniscus. The liquid supply is in fluid communication with the dispensing nozzles, and is configured to balance an amount of the liquid delivered to the meniscus with an amount of liquid removed from the meniscus, the amount of liquid removed from the meniscus including at least the thin layer of the liquid remaining on the surface of the substrate.

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