Electricity: motive power systems – Positional servo systems – Program- or pattern-controlled systems
Patent
1998-02-25
2000-05-02
Martin, David
Electricity: motive power systems
Positional servo systems
Program- or pattern-controlled systems
318590, 4147446, 4147445, 414749, G05B 1910
Patent
active
060576626
ABSTRACT:
A substrate handler for use in a chamber in a vacuum processing system has a single motor for controlling the substrate handler's rotation and extension functions. The single motor is connected to an operating assembly that operates in two modes to alternatively rotate or extend the substrate handler. The two modes are defined by the relative rotational motion of two drive mechanisms that are rotated by the single motor. When the relative rotational motion for the two drive mechanisms is in the same axial direction, then the operating assembly operates in the first mode. When the relative rotational motion for the two drive mechanisms is in the opposite axial direction, then the operating assembly operates in the second mode. The single motor operates one of the drive mechanisms and an assembly that alternatively operates the other drive mechanism in either the same or the opposite axial direction as the first drive mechanism. Under this operation, the substrate handler alternatively rotates or extends depending on whether the drive mechanisms rotate in the same or opposite axial directions.
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Kroeker Tony
McAndrew Robert M.
Applied Materials Inc.
Martin David
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