Single loadlock chamber with wafer cooling function

Details Single loadlock chamber with wafer cooling function Single loadlock chamber with wafer cooling function

1996-11-18

1999-05-11

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414416, 414937, 414939, 118719, B65G49/07

Patent

active

059020881

ABSTRACT:
A vacuum loadlock is provided for housing a pair of wafers in proper alignment for concurrent processing. In one embodiment, a single chamber loadlock is provided with a gas diffuser disposed therein to decrease venting times within the loadlock. In another embodiment, a dual chamber loadlock is provided having first and second isolatable region disposed adjacent a transfer region to increase throughput of the system.

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