Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent
1998-02-23
2000-10-17
Underwood, Donald W.
Material or article handling
Horizontally swinging load support
Swinging about pivot
414917, 901 15, B25J 1804
Patent
active
061321656
ABSTRACT:
The present invention provides a robot and a method of using the robot for transferring objects, namely substrates, through a process system. The robot provides a pair of movable arms mounted to a drive member adapted to move the arms in a rotational path to produce coordinated movements of extension, retraction, and rotation. A pair of upper struts pivotally mounted to the arms at one end pivotally connect to a first blade at their apogee ends to form a frog-leg type assembly. Likewise, a pair of lower struts pivotally mounted to the arms at one end pivotally connect to a second blade, which is radially aligned with the first blade, at their apogee ends to form a frog-leg type assembly. The pivotal connection of the upper struts to the arms are offset from the pivotal connections of the lower struts to the arms to produce a different rate of radial movement of the first blade to the second blade during extension and retraction of the blades. The robot facilitates substrate transfers, such as removal of a processed substrate and insertion of an unprocessed substrate within a processing chamber through a single entry of the robot blades into the processing chamber.
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Applied Materials Inc.
Underwood Donald W.
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