Single damascene with disposable stencil and method therefore

Details Single damascene with disposable stencil and method therefore Single damascene with disposable stencil and method therefore

2005-08-16

2008-11-18

Garber, Charles D. (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S926000, C257SE21585

Reexamination Certificate

active

07452804

ABSTRACT:
In a method of fabricating a semiconductor device, a liner is deposited over a conductive region of a wafer and a stencil layer is deposited over the liner. The stencil layer and the liner are etched to form a stencil pattern for a conductive layer. A second liner is deposited over exposed surfaces of the stencil pattern, and the exposed horizontal surfaces of the second liner are removed by sputtering. A low-k dielectric layer is then deposited over the wafer, and the wafer is planarized down to the stencil pattern by chemical-mechanical polishing. The stencil pattern is removed with a wet etch to form an aperture in the wafer exposing the liner and remaining portions of the second liner. Metal is deposited in the aperture, and the surface of the wafer is replanarized by chemical-mechanical polishing to produce a planar surface for additional metallization layers that may be deposited.

REFERENCES:
patent: 5275973 (1994-01-01), Gelatos
patent: 5695810 (1997-12-01), Dubin et al.
patent: 5710061 (1998-01-01), Cleeves
patent: 5854131 (1998-12-01), Dawson et al.
patent: 6033977 (2000-03-01), Gutsche et al.
patent: 6355563 (2002-03-01), Cha et al.
patent: 6403461 (2002-06-01), Tae et al.
patent: 6429128 (2002-08-01), Besser et al.
patent: 7088003 (2006-08-01), Gates et al.

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