Single-crystal silicon cantilever with integral in-plane tip for

Details Single-crystal silicon cantilever with integral in-plane tip for Single-crystal silicon cantilever with integral in-plane tip for

1996-08-29

1999-01-05

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

250423F, H01J 3700

Patent

active

058566724

ABSTRACT:
A cantilever for use in an atomic force microscope system is formed of single-crystal silicon and has an integral tip. The tip is formed by the convergence of three planes, one of which is one of the two outer generally parallel planes which define the thickness of the cantilever. The tip lies between the cantilever's two thickness-defining planar surfaces and is thus an in-plane integral tip. The cantilever is supported in the AFM system so that it makes an acute angle with the surface of the sample to be scanned. The cantilever can be supported in the AFM system so that the cantilever outer surface that converges to the tip is oriented to either face the sample or face away from the sample.

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