Single crystal pulling apparatus and droppage preventing device

Details Single crystal pulling apparatus and droppage preventing device Single crystal pulling apparatus and droppage preventing device

1998-12-28

2000-06-20

Utech, Benjamin L.

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

117208, 117218, C30B 3500

Patent

active

060773472

ABSTRACT:
A single crystal pulling apparatus and droppage preventing device constituted so as to enable the mechanical strength required by an arm to be decreased, and to enable arm manufacturing costs to be reduced and the pulling apparatus to be made more compact, and furthermore, to eliminate the need to provide in a separate manner a mechanism for preventing single crystal droppage, and to enhance reliability and durability by not adversely affecting a clean environment during single crystal growth. The arm has a mating member, which mates with the mating portion of a single crystal, and does not allow the single crystal to drop when pulling the single crystal. The arm undergoes an attitude change to a mating position in accordance with moving a circular motion having a circular motion support point as the center of the circular motion. And, when the single crystal mating portion is formed, the arm undergoes an attitude change, arriving at a position, at which the arm mating member is capable of mating with the mating portion of the single crystal. And then, when mated to the single crystal mating portion, the arm is raised in synch with the single crystal pulling operation. At this time, the arm is raised, maintaining a vertical attitude.

REFERENCES:
patent: 5126113 (1992-06-01), Yamagishi et al.
patent: 5843229 (1998-12-01), Kimura et al.
patent: 5879448 (1999-03-01), Urano et al.
patent: 5882397 (1999-03-01), Iino et al.
patent: 5885347 (1999-03-01), Tomioka et al.
patent: 5911821 (1999-06-01), Iino et al.
patent: 5935329 (1999-08-01), Schulmann
patent: 5951759 (1999-09-01), Inagaki et al.

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