Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1995-09-01
1996-04-23
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
H01J 37067
Patent
active
055106242
ABSTRACT:
An improved method and apparatus are provided for cleaning both a specimen stage, a specimen and an interior of an analytical electron microscope (AEM). The apparatus for cleaning a specimen stage and specimen comprising a plasma chamber for containing a gas plasma and an air lock coupled to the plasma chamber for permitting passage of the specimen stage and specimen into the plasma chamber and maintaining an airtight chamber. The specimen stage and specimen are subjected to a reactive plasma gas that is either DC or RF excited. The apparatus can be mounted on the analytical electron microscope (AEM) for cleaning the interior of the microscope.
REFERENCES:
patent: 5312519 (1994-05-01), Sakai et al.
The Use of Plasma-Cleaning for the Preparation of Clean Electron-Transparent Thin Foils, Zandbergen et al., ICEM 13-Paris, 17-22 Jul. 1994, pp. 1003-1004.
Use of Chemically Reactive Gaseous Plasmas in Preparation of Specimens for Microscopy, Richard S. Thomas, Techniques and Applications of Plasma Chemistry, A Wiley-Interscience Publication, 1974, Chapter 8, pp. 255-346.
Berman Jack I.
Nguyen Kiet T.
The University of Chicago
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