Simulation of aerial images

Details Simulation of aerial images Simulation of aerial images

2007-12-31

2009-12-15

Kik, Phallaka (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C430S005000, C378S035000, C700S120000, C700S121000

Reexamination Certificate

active

07634754

ABSTRACT:
A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

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