Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2006-09-19
2006-09-19
Moore, Margaret G. (Department: 1712)
Stock material or miscellaneous articles
Composite
Of silicon containing
C528S035000, C521S061000, C556S004000, C106S287160, C106S287130, C106S287140
Reexamination Certificate
active
07108922
ABSTRACT:
A siloxane-based resin having a novel structure and a semiconductor interlayer insulating film using the same. The siloxane-based resins have a low dielectric constant in addition to excellent mechanical properties and are useful materials in an insulating film between interconnecting layers of a semiconductor device.
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Jeong Hyun Dam
Lyu Yi Yeol
Ryu Joon Sung
Song Ki Yong
Yim Jin Heong
Harness Dickey & Pierce
Moore Margaret G.
Samsung Electronic Co. Ltd.
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